My favourites were:
Elevator Action
Gauntlet
Teenage Mutant Ninja Turtles (only multiplayer, not single player)
Gauntlet (as above)
Ghosts n Goblins
1943 (I should have shares in it, I spent that much)
Time Pilot
Green Beret
That was a while back.
Over the last few years I have only played Point Blank, Silent Scope (1 and 2) and Time Crisis (2 and 3 only).
Top game for me (if I could have any one in its original cabinet) would be Silent Scope 2 (both cabinets, linked).
Edit: Starblazer was amazing when it first came out, I think in 1986. Would love to play that again. It was the first game I saw with graphics overlaid on video, and it had sound that hasn't been beaten even today.